COURSE

MSSM5012

Introduction to Microelectromechanical Systems (MEMS): Fabrication and Application

Systems Hub / MSSM Subject Area · 3 Credits

In this course, students will delve into the intricate world of microfabrication technologies, including key processes such as photolithography, etching, deposition, and more. These techniques, used in integrated circuit (IC) fabrication, are adapted and extended to address the unique challenges posed by Microelectromechanical Systems (MEMS) design and manufacturing. The processes are explored both theoretically and practically, enabling students to develop the skills necessary for research-level prototyping and industry-scale production of MEMS. Furthermore, this course delves into the integration of MEMS and ICs, discussing the advantages and exploring different levels of integration. These discussions are complemented by detailed case studies of several MEMS devices, revealing their real-world applications and the associated micro-fabrication processes.