COURSE

SMMG5100

Microelectromechanical Systems (MEMS) Fabrication Technology

Systems Hub / Smart Manufacturing · 3 Credits

Microelectromechanical Systems (MEMS) combine electrical and mechanical components on a single chip, enabling the sensing of phenomena such as temperature, pressure, movement, and acceleration, as well as emitting signals via light or sound. These systems are essential for modern technologies, including smartphones, AR/VR platforms, and wearable electronics, and they are foundational for innovations like micro-robots. This course covers the fundamentals of microfabrication for MEMS, including techniques from integrated circuit (IC) fabrication and methods tailored to MEMS-specific challenges. It provides a comprehensive toolbox for both research-level prototyping and mass production in the MEMS industry. The curriculum includes a review of crucial microfabrication methods and case studies on micro- and nano-scale devices, focusing on their fabrication processes.